UM E-Theses Collection (澳門大學電子學位論文庫)
Title
Design and implementation of compact micro- nano-positioning stage driven by piezoelectric actuator
Issue Date
2018
Author
Wu, Ze Yi
Faculty
Faculty of Science and Technology.
Department:
Department of Electromechanical Engineering
Degree
M.Sc.
Subject
Piezoelectric devices
Microtechnology
Nanotechnology


Supervisor
Xu, Qing Song
Files In This Item:
Full-text (Intranet only)
Location
1/F Zone C
Supervisor
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