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UM E-Theses Collection (澳門大學電子學位論文庫)

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Title

Development of flexure-based micro-positioning stages driven by piezoelectric actuator

Issue date

2018.

Author

Ding, Bing Xiao

Faculty

Faculty of Science and Technology

Department

Department of Electromechanical Engineering

Degree

Ph.D.

Subject

Piezoelectric devices

Microtechnology

Supervisor

Yang, Zhi Xin

Files In This Item

Full-text (Intranet only)

Location
1/F Zone C
Library URL
991007676619706306