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UM E-Theses Collection (澳門大學電子學位論文庫)

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Title

Design and implementation of compact micro- nano-positioning stage driven by piezoelectric actuator

Issue date

2018

Author

Wu, Ze Yi

Faculty

Faculty of Science and Technology

Degree

M.Sc.

Subject

Piezoelectric devices

Microtechnology

Nanotechnology

Supervisor

Xu, Qing Song

Files In This Item

Full-text (Intranet)

Location
1/F Zone C
Library URL
991006693619706306