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UM Dissertations & Theses Collection (澳門大學電子學位論文庫)
- Title
-
Design and fabrication of MEMS microheater and its application in gas sensing
- Issue date
-
2022.
- Author
-
Chen, Yu Long
- Faculty
- Institute of Applied Physics and Materials Engineering
- Degree
-
Ph.D.
- Subject
-
Microelectronics
Gas detectors -- Design and construction
- Supervisor
-
Ng, Kar Wei
Cheng, Xing
- Files In This Item
- Location
- 1/F Zone C
- Library URL
- 991010186279806306
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